Microelectromechanical systems (MEMS) is a miniaturization technology primarily embraced by the Integrated Circuit (IC) industry and adhered to the miniaturization of all devices not only electrical, but also mechanical, optical, hydraulic, magnetic, etc. This book sheds light on a highly promising & demanding technology, which is set to revolutionize nearly every product category in present era, while discussing the Concept, Design & Development, Fabrication techniques and applications of micro electro-mechanical systems (MEMS) based Devices or systems. This book deals with research and the development of micro-electromechanical system (MEMS) sensor and actuators technology, to consider its current use in sensing technology and to identify and discuss future technological trends and directions in today’s life of technology. This book also highlights commercial and real life applications of MEMS and discusses various recent technological innovations carried out with their advantages & disadvantages.
Microelectromechanical systems (MEMS) is a miniaturization technology primarily embraced by the Integrated Circuit (IC) industry and adhered to the miniaturization of all devices not only electrical, but also mechanical, optical, hydraulic, magnetic, etc. This book sheds light on a highly promising & demanding technology, which is set to revolutionize nearly every product category in present era, while discussing the Concept, Design & Development, Fabrication techniques and applications of micro electro-mechanical systems (MEMS) based Devices or systems. This book deals with research and the development of micro-electromechanical system (MEMS) sensor and actuators technology, to consider its current use in sensing technology and to identify and discuss future technological trends and directions in today’s life of technology. This book also highlights commercial and real life applications of MEMS and discusses various recent technological innovations carried out with their advantages & disadvantages.
